Electron Cyclotron Resonance (ECR) plasma is magnetic field assisted microwave plasma. It is cold plasma which operates at much lower pressure as compared with RF and DC Plasma with corresponding higher degree of ionization. Magnetic field confinement in ECR plasma enhances the degree of ionization. ECR plasmas are becoming a popular etching, surface modification of polymer surface, nanomaterial deposition tool due to their ability to sustain highly dissociated and highly ionized plasmas at very low pressure.